In Mach3, load the Digitizing Wizard.
Try this.
Go to Operator > Edit Button Script, and click the "Create and Load G-code" Button. TheMach3 script editor should open, with the Wizard code.
Find these two lines:
code " G31 Z" & Min
code " G0 Z" & Safe
and replace them with
code " G31 Z" & Min
code " G91"
code " G0 Z0.005"
code " G90"
In the Script Editor, go to File > Save, and close the editor.
The modified wizard should now lift the probe .005" after each probe move. Adjust the value as needed (Z0.005)
Test carefully, as I haven't checked to see if this works.