I dont think there is much choice or I am sure they would let Mach handle it, backlash comp is likely part of the Mach Driver so if you dont use the Mach Driver, ie you are using an external device, you have to do things like backlash in your device.
Backlash worked well for me with the SS in the testing I did, even slackened off the bearings to make more

Holes came out nice and round, just slight marks at the quadrants but I would imagine that would happen anyway as comp cant stop cutters pushing/pulling an axis around if its slack..
Hood